Ardeo Systems’ refurbished furnaces are engineered and configured to meet the customer’s process requirements. A typical example would be a MEMS capable furnace configure with a low stress Nitride, Pyrogenic Oxidation and a Polysilicon or LTO deposition tube . A vertical Apogee 1+ furnace can be configured for either atmospheric or LPCVD processes. All systems are configured deliver “turnkey” products to minimize the customers time to first silicon.